JPH0427218U - - Google Patents
Info
- Publication number
- JPH0427218U JPH0427218U JP5809490U JP5809490U JPH0427218U JP H0427218 U JPH0427218 U JP H0427218U JP 5809490 U JP5809490 U JP 5809490U JP 5809490 U JP5809490 U JP 5809490U JP H0427218 U JPH0427218 U JP H0427218U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- pressure gas
- static pressure
- slide table
- gas support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003068 static effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5809490U JPH0427218U (en]) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5809490U JPH0427218U (en]) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0427218U true JPH0427218U (en]) | 1992-03-04 |
Family
ID=31583393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5809490U Pending JPH0427218U (en]) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0427218U (en]) |
-
1990
- 1990-05-31 JP JP5809490U patent/JPH0427218U/ja active Pending